01
ion implanters, lithography
machines, etching machines and coating machines are four core equipments of semiconductor
wafer manufacturing. ion implanter is lithography machine’s second most precies
equipment. ion implantation is composed of five parts include ion source, magnetic
analyzer, acceleration tube or deceleration tube, focusing and scanning system,
process chamber (target chamber and background processing system).
02
tungsten and
molybdenum materials have the advantages of stable high-temperature chemical
properties, low thermal deformation rate and long service life, so the ion
source parts and consumable parts of ion implantation devices used in the
semiconductor industry are mostly made of tungsten and molybdenum materials,
includes the shielding tube of cathode, arc chamber plate, etc. due to xiamen
honglu years of experience in manufacturing of tungsten and molybdenum material
, we have mature production processes and integrated inspection technique. by
optimizing the traditional process of tungsten and molybdenum material（including purifying, alloying, sintering
and densifying, grain refining and secondary grain refining by control rolling
or swaging technology etc.）, the traditional tungsten and molybdenum material lifespan, high
temperature resistance and creep resistance can be greatly improved.
03
properties and characteristics
of w/mo rod and sheet for ion source of semiconductor ion implanters.
