ultra high purity tungsten target
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time：2022/2/14 13:59:13
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in semiconductor industry, tungsten thin films are mainly utilized as a material for constituting electronic parts such as a gate electrode or the wiring material. demand of these electronic parts for high-integration, high-reliability, high-functional performance, high-speed processing has been increased. to meet the above demand, tungsten is a notable material among the metals proposed for these electronic parts, thanks to its low electrical resistance and high heat resistance. tungsten films can be deposited by physical vapor deposition (pvd) through sputtering of a high purity and high density tungsten target.
